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Generation, Modeling and Diagnostics of Microwave Plasma


Development of New Methods of Generation, Modeling and Diagnostics of Nonequilibrium Microwave Plasma in Molecular Gases

Tech Area / Field

  • PHY-PLS/Plasma Physics/Physics

3 Approved without Funding

Registration date

Leading Institute
A.V. Topchiev Institute of Petrochemical Synthesis, Russia, Moscow

Supporting institutes

  • Institute of General Physics named after A.M. Prokhorov RAS, Russia, Moscow\nKyrgyz-Russian Slavonic University, Kyrgyzstan, Bishkek


  • Laser-Laboratorium Göttingen e.V., Germany, Göttingen\nUniversita Degli Studi di Bari, Italy, Bari\nUniversity of Montreal, Canada, QC, Montreal

Project summary

Progress in the microwave technology has created the prerequisites not only for development of special-purpose equipments, but also in many scientific and technological fields, in particular, in gas microwave plasma devices.

The microwave discharge is a discharge, powered by the electro-magnetic wave which frequency exceeds 300 MHz (of wavelength λ[cm]=30/f[GHz], i.e. decimeter, centimeter and millimeter waves). Licensed frequencies for industrial, medical and scientific applications are 460, 915, 2450, 5800, 22125 MHz. Most frequently used frequency is 2450 MHz.

Microwave discharges have a significant place among other plasma generators. Now they found its application in plasma and analytic chemistry, ecology, gas discharge light sources, control of aerodynamics of flying apparatus, plasma frequency converters, etc.

In spite of wide application of the microwave discharge and growing interest in it, the variety of problems increases. Their solution determines the approach for future outlook of the plasma source and basic trends in construction of new plasma sources. The problems arise from lack of plasma data, knowledge of physical processes, which in its turn is due to difficulties with diagnostics and modeling of those plasma objects.

The aims of the Project are:

  • Development of new methods of microwave plasma generation, such as surface discharges at dielectric bodies of different shape, and discharges inside complex coaxial structures at pressures 1mTorr – 760 Torr.
  • Development of new diagnostic methods for the study of non-equilibrium microwave plasma in molecular gases (hydrogen, nitrogen, air). These methods, based on the plasma emission spectroscopy and probe diagnostics, can be used not only in research, but in manufacturing equipment for the optimization of plasma processes.
  • Design of computational models of different level of complexity. These codes allow processing the experimental data and model different types of the microwave discharges. They are able to investigate physical and chemical discharge processes and obtain the information inaccessible from other methods.
  • By the example of new microwave plasma sources the abilities of the developed diagnostic methods and modeling will be demonstrated.

Scientific value of the Project is in getting of huge volume of information about one of the least studied types of a discharge, which itself is a big contribution to investigation of fundamental phenomena of the gas discharge and low temperature plasma. Developed diagnostic and modeling methods will be the base for examination of different plasma set-ups. New methods of plasma generation will enlarge the application range of the low temperature plasma.

The Project participants have wide experience in diagnostics, mathematical modeling and developing of microwave plasma devices of different application and represent leading research centers in this area. The results of work collectives’ activity in the field of the microwave discharge can be found in a big number of publications in reviewed scientific journals.


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