Ion Implementation into Solid Solution
Investigation of Physico-Chemical Processes During Implantation of Different Types Ions into Triple and Fourfold Solid Solutions on the Basis of A3 B5 Compounds.
Tech Area / Field
- CHE-THE/Physical and Theoretical Chemistry/Chemistry
3 Approved without Funding
Institute of Chemical Problems of Microelectronics (IKhPM), Russia, Moscow
- JSC Sapfir, Russia, Moscow
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