Laser Plasma Chemical Reactor
Tech Area / Field
- PHY-OPL/Optics and Lasers/Physics
- PHY-PLS/Plasma Physics/Physics
- MAT-SYN/Materials Synthesis and Processing/Materials
3 Approved without Funding
VNIIEF, Russia, N. Novgorod reg., Sarov
- Institute of General Physics named after A.M. Prokhorov RAS, Russia, Moscow
The development of the novel laser plasma chemical vapor deposition (CVD) method of materials synthesis with high deposition rates will be performed in the Project proposed. The principle possibility of its realization has been demonstrated at NSC GPI RAS [1-3]. The new technique is based on a stationary laser plasma maintained by continuous СО2-laser in the gas stream at atmospheric pressure. The generators of such gas-plasma jet is optical (laser) plasmatrons. This method can be applied for obtaining of many perspective materials and was implemented for the case of diamond films deposition. It allows to carry out the diamond synthesis directly in the atmospheric air without using of vacuum chambers.
The complex investigations of common physicochemical processes in laser CVD reactor on the example of diamond films synthesis as a special case of new laser method application will be performed in the proposed Project. The following investigation directions are supposed to be solved in the framework of the Project:
1. Experimental examination of deposition regimes and determination of deposition conditions influence (substrate temperature, laser power, chemical composition and flow velocities of gas mixtures, laser plasmatrons constructional parameters etc.) on growth rates, properties and quality of diamond films obtained.
2. Spectroscopic and interferometric measurements of plasma parameters: electron and ion temperatures, relative concentrations of active particles in laser plasma, their spatial distribution, density and jet flows turbolisation interference patterns in plasma, electron density and absorption coefficient of radiation supporting plasma.
3. Search of correlations between plasma parameters and deposition conditions in order to optimize the synthesis process for obtaining high deposition rates and quality of diamond films and layers. Fabrication and demonstration of non-vacuum laser plasmatron prototype for diamond coatings deposition directly in air.
As a result of the investigations performed the new knowledge about optical discharges nature in gas mixtures of complex chemical composition; laser plasmatrons perspective constructions; laser radiation parameters and hot laser plasma influence on the physicochemical characteristics of films, their phase structure and growth rates; correlation between plasma parameters, deposition conditions and growth rates of diamond films to increase the latter will be obtained. This in turn will allow to develop the basis of the new laser CVD technology and to create the set-up prototype using the stationary optical discharge in a gas jet effusing into atmosphere for polycrystalline diamond films deposition. The investigation results obtained during realization of the Project will be past question used in the laser-plasma technologies development for other perspective materials deposition. The novel laser-plasma technology owing to high deposition rates and simplification of the deposition process in air will allow to considerably decrease the production cost price of details using diamond coatings (for example, cutting tools), and workpieces made of diamond (windows, heat rejections etc.).
The scientists and engineers (16 men) from NSC GPI RAS and RFNC-VNIIEF which were earlier engaged in improvement and test of the nuclei and laser weapon will participate in the Project. Working on the Project they will be redirected on the solution of the applied problems of laser interaction with matter and of a novel technologies development. Thus, their qualification will be used in the peace purposes. Working on this project Russian experts having worked on closed themes related with development of the nuclei and laser weapon will be involved in international scientific community.
The scientists and engineers of NSC GPI RAS and RFNC-VNIIEF have the necessary qualification and inventory for Project realization. The works under the Project will be shared between NSC GPI RAS and RFNC-VNIIEF in the following way. NSC GPI RAS will perform the experiments on laser-plasma deposition of diamond films and plasma emissive spectroscopy. RFNC-VNIIEF will carry out the interferometric investigations of stationary optical discharge plasma. The development of procedures and experimental schemes design for investigations of plasma of the laser plasmatron by interferometry (RFNC-VNIIEF) and emission spectroscopy (NSC GPI RAS) will be performed preliminary. NSC GPI RAS and RFNC-VNIIEF will carry out analysis and processing of the experimental data obtained in order to optimize the process of diamond films synthesis. On the basis of this information there will be fabricated and demonstrated the laser plasmatron prototype and also are formulated the basic technical requirements to the new laser non-vacuum technology of perspective materials synthesis.
The participation of foreign collaborators will be consist in the technical support on the selective analysis of the diamond films obtained, consultations on interpretation of experimental results and information interchange during realization of the Project.
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