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Heavy Gas Discharge X-Ray Source


The Soft X-ray Source Based ECR-discharge Sustained by Powerful Gyrotron Radiation in Heavy Gases.

Tech Area / Field

  • PHY-PLS/Plasma Physics/Physics

8 Project completed

Registration date

Completion date

Senior Project Manager
Ryabeva E V

Leading Institute
Russian Academy of Sciences / Institute of Applied Physics, Russia, N. Novgorod reg., N. Novgorod

Supporting institutes

  • VNIIEF, Russia, N. Novgorod reg., Sarov\nNIIIT (Pulse Techniques), Russia, Moscow\nVNIITF, Russia, Chelyabinsk reg., Snezhinsk


  • Strathclyde University / Department of Physics and Applied Physics, UK, Glasgow\nUniversität Karlsruhe / Institut für Technische Physik, Germany, Karlsruhe\nFOM / Instituut voor Plasmafysica, The Netherlands, Neiuwegein

Project summary

The aim of proposed Project is to investigate the main physical features of microwave discharge in heavy gases sustained by powerful millimeter wave radiation of Russian gyrotrons in mirror magnetic traps under the condition of electron cyclotron resonance (ECR) and to investigate the perspectives of using such a plasma as a source of soft X-ray (SXR) radiation for various applications, and first of all, for high resolution X-ray lithography.

At present in the Institute of Applied Physics Russian Academy of Sciences (IAP RAS) work lias already began on the creation SXR source and the first rather promising results on the conversion of microwave radiation into SXR have been obtained: preliminary results gave estimate for this efficiency about 25% (with energy of quanta in the vicinity of 100 eV).

Within the proposed Project it is supposed to perform detailed investigation of a dense plasma of ECR discharge in heavy gases with high (not available up to recent time) specific power deposition into discharge plasma with the aim to find optimal conditions for the effective conversion of microwave radiation into SXR.

To increase soft X-ray source efficiency it is supposed to increase essentially plasma density (by about two orders of magnitude as compared with present-day installations) with the maintenance of electron energy in a range of few keV which, apparently, will be possible using the gyrotron radiation of millimeter wavelength region with the power of hundreds kW and with optimal matching of rf radiation to the magnetized plasma of ECR discharge. It is also supposed to investigate the possibility of SXR spectrum modification by varying the neutral gas composition and density.

For realization of the Project it is assumed to use the unique equipment available in IAP (gyrotron complex with cryomagnet and high-vokage power supply) and soft X-ray diagnostics components designed in RRSIEP, RSRITP and SRIPT.

The uniting of efforts of all these Institutions seems to be quite necessary for the realization of proposed Project.


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